PURPOSE
installation is designed/intended for verification and calibration of vacuum gauges of different types and modes of operation.
MODE OF OPERATION
the installation is a high-vacuum system with high-precision reference vacuum gauges. Veri-fication and calibration are carried out by the method of direct comparison. The installation is developed considering the requirements of the document “Recommendation. State system for ensuring the uniformity of measurements. Vacuum gauges. Verification technique. MI 140-89. ” At the request of the customer, the installation can be included in the Federal Information Fund for ensuring the uniformity of measurements as a single reference complex.
SPHERES OF APPLICATION
the aerospace and nuclear industries, the production of modern weapons, space simulation, electrical engineering, semiconductor technologies, metallurgy, particle physics, metrology, research in the field of deep vacuum study, technology for growing thin films and crystals, biotechnology and medical technology, etc.
| Measurement range | from 10-5 to 103 |
| Limits of permissible relative error of measurements | ± (15-10) % |
